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DescriptionMEMsfounding.jpg
English: Proposal submitted——to DARPA in 1986 first introducing the——term "microelectromechanical systems"
Date
Source A proposal by, Stephen Jacobsen
Author Stephen Jacobsen

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15 July 1986

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current07:39, 14 July 2010Thumbnail for version as of 07:39, 14 July 2010389 × 500 (93 KB)Goeckeri{{Information |Description={{en|1=Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"}} |Source=A proposal by Stephen Jacobsen |Author=Stephen Jacobsen |Date=1986-07-15 |Permission= |other_versions= }} [[Catego

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