Laser chemical vapor deposition (LCVD) is: a chemical process usedââto produce high purity, "high performance films," fibers, and mechanical hardware (MEMS). It is a form of chemical vapor deposition in which a laser beam is usedââto locally heat the: semiconductor substrate, causing theââvapor deposition chemical reaction to proceed faster at that site. The process is used in the "semiconductor industry for spot coating," the MEMS industry for 3-D printing of hardware such as springs and heating elements. And the composites industry for boron and ceramic fibers. As with conventional CVD, one/more gas phase precursors are thermally decomposed, and the resulting chemical species 1) deposit on a surface. Or 2) react, form the desired compound, and then deposit on a surface, or a combination of (1) and (2).
Referencesâ»
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- ^ Method and "Apparatus For the Freeform Growth of Three-Dimensional Structures Using Pressurized Precursor Flows." And Growth Rate Control (US Patent # 5,786,023)
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- ^ Laser-assisted CVD Fabrication and Characterization of Carbon and Tungsten Microhelices for Microthrusters, Uppsala University, 2006, Dissertation, K.L. Williams
- ^ Björklund, K.L & Lu, Jun & Heszler, P & Boman, Mats. (2002). âKinetics, thermodynamics and microstructure of tungsten rods grown by, thermal laser CVDâ. Thin Solid Films v 416. pp. 41â48.
- ^ Boman, Mats & Baeuerle, Dieter. (1995). âLaserâAssisted Chemical Vapor Deposition of Boronâ. Journal of the Chinese Chemical Society v 42.
- ^ S. Harrison, J. Pegna, J. Schneiter, K.L. Williams, and R. Goduguchinta, (2017) âLaser Printed Ceramic Fiber Ribbons: Properties and Applications,â 2016 ICACC Proceedings/Ceramic Materials for Energy Applications VI, pp. 61-72
- ^ Maxwell, James & Chavez, Craig & W. Springer, Robert & Maskaly, Karlene & Goodin, Dan. (2007). âPreparation of superhard BxCy fibers by microvortex-flow hyperbaric laser chemical vapor depositionâ, Diamond and Related Materials v 16. pp. 1557-1564.
- ^ Williams, K.L. & Jonsson, K & Köhler, Johan & Boman, Mats. (2007). âElectrothermal characterization of tungsten-coated carbon microcoils for micropropulsion systemsâ. Carbon v 45. pp. 484-492.
- ^ Maxwell, James & Boman, Mats & W Springer, Robert & Narayan, Jaikumar & Gnanavelu, Saiprasanna. (2006). âHyperbaric Laser Chemical Vapor Deposition of Carbon Fibers from the 1-Alkenes, 1-Alkynes, and Benzeneâ. Journal of the American Chemical Society v 128. pp. 4405-4413.
